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PVD
PECVD
Etch
ICPCVD
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Etch
Etch
Applications
MEMS
VOx
Getter
Poly
Oxide
Metal
Nitride
PI,PR
Glass
AIsCN&AIN
POWER
SiC
Poly
Metal
Oxide
Nitride
GaN
PI,PR
III-V(RF)
SiC BSV
GaN&AIGaN
GaAs&GaP
Metal
InP
Sappier
PI,PR
LiNbO3&LiTaO3
TiO2
IC
Poly
Metal
Nitride
Oxide
PI,PR
Glass Wafer
ITO
IGZO
Metal
Glass
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